Thin-film deposition using low-energy ion beams (4) Ion source modification

• 1 January 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (1) , 118-119
• https://doi.org/10.1116/1.569418

Abstract

Keywords

• ION BEAM
• THIN FILM DEPOSITION