Accurate positional servo for use with pneumatically supported masses and vibrationally isolated tables
- 1 July 1987
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 58 (7) , 1303-1305
- https://doi.org/10.1063/1.1139458
Abstract
A noncontacting electropneumatic servosystem for the positional control of vibrationally isolated tables is described. Employing a ‘‘live zero,’’ integrating servo, the system has been used to position an ‘‘air spring’’ supported optical table to within a few microns and a few seconds of arc for a period of several months. If needed, the system can be extended to provide for control of all six degrees of freedom. This system provides an improvement in positional stability of between 2 and 3 orders of magnitude over typical commercial systems.Keywords
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