Spectral interferometric sensors for gases and liquids using integrated optical devices

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Abstract
Investigations for a sensor application with an integrated optical (IO) interferometric arrangement are presented. One of the two waveguide arms of an IO-Mach-Zehnder- interferometer is covered with a thin layer of polysiloxane (superstrate), which is sensitive to hydrocarbons. The dielectric IO-devices are fabricated by IOT. Gases of organic compounds including halogenated and non-halogenated hydrocarbons cause a change of the polysiloxan's refractive index followed by an increase or decrease of the effective refractive index of the covered waveguide arm. The resulting phase shift between the guided light in the measuring and the reference arm depends on the detection wavelength and the concentration of gas. Using an LED as the light source the spectral interferogram becomes observable and so order and phase of the signal can be determined. The aim of this work is the development of a reversibly working, miniaturized sensor with a short response time. The advantages of spectral observation of the interference are discussed. A comparison between measured and calculated spectral interference signals is given.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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