Surface chemistry and mechanical behavior of silicon carbide and silicon nitride implanted with titanium to high fluences and high temperatures
- 31 December 1987
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 33, 487-499
- https://doi.org/10.1016/0257-8972(87)90213-1
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- X-ray photoelectron spectroscopy observations of argon-ion bombardment effects on phase separated structures such as SiNx alloys or Si/Si3N4 interfacesJournal of Vacuum Science & Technology A, 1986
- Mechanical property changes in sapphire by nickel ion implantation and their dependence on implantation temperatureJournal of Materials Science, 1986
- Modification of surface properties of yttria stabilized zirconia by ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- The amorphization of ceramics by ion beamsMaterials Science and Engineering, 1985
- Changing the surface mechanical properties of silicon and α-Al2O3 by ion implantationJournal of Materials Science, 1984
- Phase equilibria in thin-film metallizationsJournal of Vacuum Science & Technology B, 1984
- Lattice Modification in Ion‐Implanted CeramicsJournal of the American Ceramic Society, 1984
- A Critical Evaluation of Indentation Techniques for Measuring Fracture Toughness: I, Direct Crack MeasurementsJournal of the American Ceramic Society, 1981
- Elastic/Plastic Indentation Damage in Ceramics: The Median/Radial Crack SystemJournal of the American Ceramic Society, 1980
- Depth distribution of energy deposition by ion bombardmentComputer Physics Communications, 1974