Process enhancements for positive tone silylation

• 30 April 1993
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 21  (1) , 231-234
• https://doi.org/10.1016/0167-9317(93)90062-a

Abstract

Keywords

• CROSSLINKING
• SILYLATION
• CID
• AMPLIFIED
• LITHOGRAPHIC
• UNDERSIRABLE
• POSITIVE TONED
• ILYLATED
• SAHRTM
• ARDENED