Scanning electron microscopy in submicron structure diagnostics
- 31 December 1988
- Vol. 38 (11) , 1045-1050
- https://doi.org/10.1016/0042-207x(88)90572-6
Abstract
No abstract availableKeywords
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- Charge collection scanning electron microscopyJournal of Applied Physics, 1982
- On the sensitivity of the EBIC technique as applied to defect investigations in siliconPhysica Status Solidi (a), 1981
- A new spectroscopic technique for imaging the spatial distribution of nonradiative defects in a scanning transmission electron microscopeApplied Physics Letters, 1977