An analysis of the optics of a field ionization ion source for application with a scanning proton microprobe
- 1 December 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (12) , 5653-5660
- https://doi.org/10.1063/1.1143396
Abstract
This article analyzes a field ionization source for use within a pelletron accelerator which provides the primary beam for a scanning proton microprobe. The charge simulation method is used to calculate the electrostatic field, and ray tracing is used to determine optical properties. Current characteristics are taken from experimental results. Gaussian properties indicate an effective source radius of below 10−3 μm at low angles. Chromatic aberration is calculated by perturbing initial particle energies, then tracing back from field‐free trajectories. Calculations indicate that at typical source voltages, the beam is never chromatically limited. Spherical aberration is also calculated and the source is found to be spherically limited above a divergence of approximately 0.1 rad. Finally, calculations indicate that a brightness of 106 A m−2 rad−2 V−1 is achieved by the source producing 150 pA of current at a tip electric field of 25 V/nm.Keywords
This publication has 9 references indexed in Scilit:
- Characteristics of a hydrogen gas field ion source for muprobe applicationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Determination of the Optimum Electrode Shape of Electrostatic Einzel LensesJapanese Journal of Applied Physics, 1983
- The Melbourne proton microprobeJournal of Microscopy, 1979
- Study of a field-ionization source for microprobe applicationsJournal of Vacuum Science and Technology, 1975
- Dissociative field ionization of H2 and HDThe Journal of Chemical Physics, 1975
- Point-cathode electron sources-electron optics of the initial diode regionJournal of Applied Physics, 1973
- Current—Voltage Characteristics by Image Photometry in a Field-Ion MicroscopeJournal of Applied Physics, 1966
- Current-voltage characteristics of the helium field-ion microscopePhilosophical Magazine, 1963
- Occurrence of H3+ in the Field Ionization of HydrogenThe Journal of Chemical Physics, 1962