Thermal Desorption Studies of Phosphorus‐Doped Spin‐on‐Glass Films

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Abstract
Thermal desorption spectroscopy was used to study an outgassing from silanol‐based spin‐on‐glass films with phosphorus doping, cured at a temperature range between 200 and 400°C. Primary desorption products were found to be water and ethylene. Thermal desorption studies using a ramped heating revealed distinct desorption states for water and ethylene evolution between 60 and 600°C. Water desorbed from the films around 100°C via the decomposition of P‒OH bonds. Simultaneous desorption of water and ethylene occurred at 280 and 430°C. The desorption at lower temperature originated from resdiual bonds and the desorption at higher temperature from residual bonds in the films. Residual Si‒OH bonds also provided water desorption around 280°C. It was confirmed that increasing the curing temperature effectively reduces the sources of outgassing. The residual ethyl components were found to be completely removed by high temperature annealing at 400°C.

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