Quantitative comparison of Ti and TiO surfaces using Auger electron and soft x-ray appearance potential spectroscopies

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Abstract
Integration techniques have been used to obtain the relative surface concentrations of Ti in Ti metal and TiO and between Ti and O in the oxide by Auger electron and soft x-ray appearance potential spectroscopies. It is shown that the use of peak-to-peak signal strengths in derivative data as a measure of relative concentration can give erroneous results due to differences in the line shapes of the various features. This sensitivity to the details of the spectral shapes is shown to be essentially eliminated in data corresponding to the integrals of the derivative spectra. The AES values thus obtained are in good agreement with those to be expected for Ti and TiO and the agreement between the values obtained by the two techniques is shown to be considerably improved.