The effect of annealing on the structure of cathodic arc deposited amorphous carbon nitride films
- 1 December 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 290-291, 99-102
- https://doi.org/10.1016/s0040-6090(96)09069-4
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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