Growth of Silicon-on-Insulator Films using a Line-Source Electron Beam
- 1 January 1982
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A line-source electron beam annealing systemJournal of Applied Physics, 1982
- Laser and Electron Beam Interactions with SolidsMRS Bulletin, 1982
- Zone-melting recrystallization of encapsulated silicon films on SiO2—morphology and crystallographyApplied Physics Letters, 1982
- Explosive crystallization of amorphous germaniumApplied Physics Letters, 1981
- Dislocation Etch for (100) Planes in SiliconJournal of the Electrochemical Society, 1972