Pulsed desorption kinetics using micromachined microhotplate arrays

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 2549-2553
• https://doi.org/10.1116/1.579055

Abstract

Keywords

• PULSED DESORPTION
• DESORPTION KINETICS
• MICROMACHINED MICROHOTPLATE
• KINETICS USING
• MICROHOTPLATE ARRAYS
• USING MICROMACHINED