High Performance (AlAs/n-GaAs Superlattice)/GaAs 2DEGFETs with Stabilized Threshold Voltage

Abstract
Novel two dimensional electron gas FETs, which have a short period AlAs/n-GaAs superlattice for an electron supplying layer, were successfully fabricated for the first time using a molecular beam epitaxy and a conventional recessed gate process. The threshold voltage changes with changes in temperature (77–300 K) and resulting from light illumination are effectively suppressed (ΔV T≈0.1 V). This stability is ascribed to low deep electron trap concentration in the superlattice. The high intrinsic transconductances of 325 mS/mm (77 K) and 146 mS/mm (300 K) are obtained for 3 µm gate FETs.