Planar 100 GHz silicon detector circuits
- 31 October 1991
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 15 (1-4) , 285-288
- https://doi.org/10.1016/0167-9317(91)90230-b
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- An Industrial Single‐Slice Si‐MBE ApparatusJournal of the Electrochemical Society, 1989
- Doping by Secondary ImplantationJournal of the Electrochemical Society, 1986