Imprint lithography for flexible transparent plastic substrates
- 1 August 2004
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 75 (2) , 145-148
- https://doi.org/10.1016/j.mee.2004.03.084
Abstract
No abstract availableKeywords
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- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995
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