Novel Automatic Measuring System for Resistivity Profiles in Silicon Wafers

• 1 January 1980
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 19  (1) , 169-173
• https://doi.org/10.1143/jjap.19.169

Abstract

Keywords

• SILICON WAFER
• MEASUREMENT SYSTEM
• ARSENIC