New interferometric profiler for smooth and rough surfaces

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Abstract
A new method of optical, non-contact profiling of rough surfaces is described that utilizes interferometric techniques as well as digital signal processing algorithms to produce fast, accurate, repeatable 3-D surface profile measurements. When combined with more traditional phase-shifting measurement techniques, this produces an instrument capable of profiling surfaces with rms roughness, Rq, ranging from 1 angstrom to 20 micrometers , and measurement of steps up to 100 micrometers . Sample data are discussed and a comparison with other surface profiling techniques is presented.

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