Bi-Sr-Ca-Cu-oxide superconducting thin films deposited by dc magnetron sputtering

6 June 1988

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 52 (23) , 1992-1994
https://doi.org/10.1063/1.99598

Abstract

Thin films of the high‐temperature superconductor Bi‐Sr‐Ca‐Cu‐oxide were deposited by dc magnetron sputtering onto various substrates. Films deposited on (100) MgO substrates achieved zero resistance between 78 and 82.5 K depending upon the annealing conditions. The best films were produced with a quick post‐anneal in oxygen at 870 °C followed by a slower anneal in air at the same temperature. The composition of the sputtered films was uniform within ±3% over an area 40 mm in radius, and films deposited at 15 and 40 mm from the center of deposition both exhibited high T_c transitions.

Keywords

This publication has 1 reference indexed in Scilit:

Growth and Optical Properties of Li₁₃Nd(GeO₄)₄ Single Crystal
Japanese Journal of Applied Physics, 1988