Capacity planning of a photolithography work cell in a wafer manufacturing line
- 23 March 2005
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 4, 702-708
- https://doi.org/10.1109/robot.1987.1087949
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Performance Analysis Techniques for IC Manufacturing LinesAT&T Technical Journal, 1986
- Investing in Reduced Setups in the EOQ ModelManagement Science, 1985
- Off-Line Quality Control in Integrated Circuit Fabrication Using Experimental DesignBell System Technical Journal, 1983