Verification of the sub-nanometric capability of an NPL differential plane mirror interferometer with a capacitance probe
- 1 September 1998
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 9 (9) , 1437-1440
- https://doi.org/10.1088/0957-0233/9/9/010
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Absorbing beam splitter in a Michelson interferometerApplied Optics, 1995
- A proposed design for a polarization-insensitive optical interferometer system with subnanometric capabilityPrecision Engineering, 1993
- Optical fringe subdivision with nanometric accuracyPrecision Engineering, 1990
- Beam-splitter Coatings for Producing Phase Quadrature Interferometer OutputsOptica Acta: International Journal of Optics, 1978