Microfabrication of Silicon-Based Nanoporous Particulates for Medical Applications

• 1 January 2003
• journal article
• Published by Springer Nature in Biomedical Microdevices
• Vol. 5  (3) , 253-259
• https://doi.org/10.1023/a:1025768411300

Abstract

Keywords

• SILICON
• DIOXIDE
• SILICON DIOXIDE PARTICLE
• MEDICAL APPLICATION
• POROUS SILICON