On the structure of thin hydrocarbon films
- 27 September 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (13) , 1771-1773
- https://doi.org/10.1063/1.110683
Abstract
We compare reported compositions of a‐C:H films in a ternary phase diagram. It is assumed that the films comprised three phases: sp 3 hybridized carbon,sp 2 hybridized carbon and hydrogen. The data are found to split into two well‐separated groups. This separation depends on the method used to measure the sp 3/sp 2 ratio. We conclude from the comparison of NMR and infrared data that infrared analysis does not provide a quantitative measure of the sp 3/sp 2 ratio.Keywords
This publication has 29 references indexed in Scilit:
- Mechanical properties and coordinations of amorphous carbonsPhysical Review Letters, 1992
- Local coordination of carbon atoms in amorphous carbonPhysical Review B, 1991
- Structural analysis of hydrogenated diamond-like carbon films from electron energy loss spectroscopyJournal of Materials Research, 1990
- Diamond-like carbon films grown by a large-scale direct current plasma chemical vapor deposition reactor: System design, film characteristics, and applicationsJournal of Vacuum Science & Technology A, 1990
- Characterization of amorphous hydrogenated carbon using solid-state nuclear magnetic resonance spectroscopyChemistry of Materials, 1990
- Structural and Electronic Properties of Amorphous CarbonPhysical Review Letters, 1989
- Influence of H-C bonds on the stopping power of hard and soft carbonized layersPhysical Review B, 1988
- EELS analysis of vacuum arc-deposited diamond-like filmsPhilosophical Magazine Letters, 1988
- The structure of plasma‐polymerized toluene: A solid‐state 13C‐NMR study of isotopically labeled polymersJournal of Polymer Science: Polymer Chemistry Edition, 1983
- A 13C‐NMR investigation of plasma polymerized ethane, ethylene, and acetyleneJournal of Polymer Science: Polymer Chemistry Edition, 1981