Regular artificial nanometer-scale structures fabricated with scanning tunneling microscope
- 3 April 1995
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 66 (14) , 1747-1749
- https://doi.org/10.1063/1.113354
Abstract
The scanning tunneling microscope (STM) has been used to fabricate grooves a few nm wide at room temperature by extracting atoms one by one from the Si(111)7×7 surfaces. When the direction of modification is parallel to the basic vector of Si(111)7×7 surfaces, grooves formed by such a process have atomically straight edges and lateral features as small as one 7×7 unit cell wide. The critical current under various voltages for fabricating grooves is measured. The modification mechanism is discussed based on the experiment data in this letter.Keywords
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