An improved scanning system for a high-voltage electron microscope

Publisher Website
Google Scholar
Abstract
The 750 kV Cavendish electron microscope has been adapted for scanning transmission operation. Disturbing magnetic fields at 50 and 100 Hz and at 8 kHz have been tracked carefully and successively removed to produce an electron beam without cross modulation. Further attention to detail in HV and lens electronics as well as in deflection systems led to an electron probe smaller than 3 nm in diameter. By operating the last demagnifying (objective) lens at very high excitation and by introducing a new electron detector, less than 4 nm point-to-point resolution has been obtained at 500 kV.

This publication has 1 reference indexed in Scilit: