Physical properties of nitrogenated amorphous carbon films produced by ion-beam-assisted deposition
- 1 December 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 253 (1-2) , 85-89
- https://doi.org/10.1016/0040-6090(94)90299-2
Abstract
No abstract availableKeywords
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