Two-dimensional carrier profiling of InP structures using scanning spreading resistance microscopy
- 12 October 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (15) , 2155-2157
- https://doi.org/10.1063/1.122408
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Epitaxial staircase structure for the calibration of electrical characterization techniquesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Cross-sectional nano-spreading resistance profilingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Chemical vapor deposition diamond for tips in nanoprobe experimentsJournal of Vacuum Science & Technology A, 1996