Nanolithography using field emission and conventional thermionic electron sources
- 1 April 1989
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 28 (1-4) , 324-329
- https://doi.org/10.1016/0304-3991(89)90318-5
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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