Correction for loss effects in valence-band XPS spectra by deconvolution

Abstract
We present XPS valence band spectra for GaAs (110) and GeSe (001) that have been corrected for coherent loss effects by deconvolution of an instrument/loss function that includes a source function for an unmonochromatized source, a backscattered-electron spectrum to account for energy losses, and an analyzer function. The results are compared with background-subtracted spectra. The deconvolution yields spectra that have significantly greater intensity deep in the band, bringing measurements into closer agreement with theory than is achieved with background subtraction.