Optimization of the ion implantation process
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1) , 521-522
- https://doi.org/10.1016/0168-583x(87)90895-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Penning ionization in a plasma ion sourceNuclear Instruments and Methods in Physics Research, 1981
- Electromagnetic isotope separator at LublinNuclear Instruments and Methods, 1965