Piezoresistivity of Polycrystalline Diamond Films
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Piezoresistivity in vapor-deposited diamond filmsApplied Physics Letters, 1992
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- Laser-recrystallized polysilicon resistors for sensing and integrated circuits applicationsSensors and Actuators, 1983