Optical DUV-lithography for high microstructures

• 22 November 1996
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 3  (1) , 1-6
• https://doi.org/10.1007/s005420050045

Abstract

Keywords

• ELECTRODEPOSITION
• TECHNOLOGY
• THICKNESS
• MICROSYSTEM
• STEP
• STRUCTURING
• MOULDING
• FABRICATED