The dependence of coating in inductive R.F. plasmas on gas flow velocity, pressure and R.F. power
- 1 October 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 72 (2) , 249-260
- https://doi.org/10.1016/0040-6090(80)90006-1
Abstract
No abstract availableKeywords
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