Influence of Film Condensation and Source Radiation on Substrate Temperature

• 1 January 1970
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 7  (1) , 274-277
• https://doi.org/10.1116/1.1315817

Abstract

Keywords

• FILM CONDENSATION
• SUBSTRATE TEMPERATURE
• SOURCE RADIATION
• CONDENSATION AND SOURCE
• RADIATION ON SUBSTRATE