Ultrahigh vacuum system for the study of the mechanical and electrical properties of metallic surfaces
- 1 November 1974
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 11 (6) , 1166-1169
- https://doi.org/10.1116/1.1318703
Abstract
A bakeable ultrahigh vacuum system was constructed for the study of the mechanics of deformation, contact resistance, bonding, friction, and high-resolution topography of metallic surfaces in contact. The instrument consists of a work chamber which is isolated from building vibrations and in which metallic samples may be cleaned by sputtering, annealed by electron bombardment, and brought together with precise control of mechanical and environmental variables. Facilities are provided for load and contact resistance measurements. A laser interference fringe microscope, which is mounted in the work chamber, is used for quantitative surface topography determinations and the measurement of load-bearing areas. This system has been used for electrical contact and solid-phase bonding studies.Keywords
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