A survey of methods of measuring thin film thicknesses and surface irregularities
- 1 December 1963
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 2 (3) , 227-233
- https://doi.org/10.1016/0026-2714(63)90008-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Oxide Films on Silver at High TemperaturesNature, 1957
- A High-Resolution Surface-Profile MicroscopeNature, 1952
- Optical methods of studying films on reflecting bases depending on polarisation and interference phenomenaTransactions of the Faraday Society, 1946
- An Optical Investigation of Oxide Films on MetalsJournal of the Optical Society of America, 1939