Incorporation and behavior of helium in co-deposited films
- 1 January 1974
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 11 (1) , 52-55
- https://doi.org/10.1116/1.1318660
Abstract
Mixtures of normally insoluble helium and gold have been formed by co-deposition using both sputter deposition and e-beam (electron-beam) evaporation in a helium discharge for the purpose of studying the behavior of various amounts of helium in gold. Thin films containing 10–30 at.% helium (inferred) formed by these techniques were examined by transmission electron microscopy. It is shown that for sputter-deposited films on water-cooled substrates the helium is either dispersed atomically or in void nuclei smaller than the resolution of the analytical technique. For e-beam-deposited films and heated, continuous sputter-deposited films, internal voids are found which grow with subsequent heating. It is proposed that the sputter co-deposition technique may be a useful technique for fabricating insoluble gas-metal alloys and that the sputter deposition and evaporation techniques may be useful for stimulating radiation effects of inert gases in reactor materials. An ultraclean vacuum system suitable for recycling discharge gases is described.Keywords
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