8 x 8 array of thin-film photodetectors vertically electrically interconnected to silicon circuitry
- 1 October 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (10) , 1168-1170
- https://doi.org/10.1109/68.466579
Abstract
This paper reports the integration of an 8/spl times/8 array of thin-film GaAs-AlGaAs photodetectors onto a silicon-oscillator array circuit for massively parallel-image processing applications. Each detector was electrically connected to the oscillator below it using vertical electrical interconnections. Both sides of the thin-film devices were metallized for electrical contact, which minimized the interconnection density on the silicon circuit, thereby maximizing the available signal processing area. The yield of this integrated array and associated circuit was 100%, with the majority of pixels demonstrating a dynamic range of 50 dB.Keywords
This publication has 4 references indexed in Scilit:
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