An i n s i t u infrared study on the interaction of oxygen plasmas with Si and fluorine plasmas with SiO2 surfaces
- 1 September 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 5 (5) , 1450-1452
- https://doi.org/10.1116/1.583840
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: