Field emission and atom probe field ion microscope studies of palladium-silicide-coated silicon emitters
- 1 March 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 13 (2) , 603-606
- https://doi.org/10.1116/1.587923
Abstract
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