Effects of initial growth conditions on the stress profiles of Mo sputtered onto both moving and stationary substrates
- 1 July 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 10 (4) , 1442-1445
- https://doi.org/10.1116/1.578262
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: