Solar Cells from Mixed SiCi₂H₂ and SiH₄ Plasmas

Publisher Website

1 January 1997

journal article
Published by Springer Nature in MRS Proceedings

Vol. 467
https://doi.org/10.1557/proc-467-789

Abstract

No abstract available

Keywords

This publication has 3 references indexed in Scilit:

Amorphous Silicon Films from Dichlorosilane and SiH₄ for Solar Cells
MRS Proceedings, 1996
Fast growth of hydrogenated amorphous silicon from dichlorosilane
Applied Physics Letters, 1994
Determination of the thickness and optical constants of amorphous silicon
Journal of Physics E: Scientific Instruments, 1983