Conical topography formed on ion-etched crystalline surfaces
- 1 November 1975
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 46 (11) , 5053-5054
- https://doi.org/10.1063/1.321500
Abstract
An equation based on ion channeling in a crystal is shown to predict the apex angle of cones formed on surfaces eroded by ions in the energy range 1–30 keV for 37 ion-target-energy combinations.This publication has 13 references indexed in Scilit:
- Frank's kinematic theory of crystal dissolution applied to the prediction of apex angles of conical ion-bombardment structuresJournal of Materials Science, 1975
- The behaviour of surfaces under ion bombardmentReports on Progress in Physics, 1975
- Prediction of the apex angle of surface cones on ion-bombarded crystalline materialsJournal of Materials Science, 1974
- Development of a general surface contour by ion erosion. Theory and computer simulationJournal of Materials Science, 1974
- The development of ion-bombardment surface structures on stainless steelJournal of Materials Science, 1974
- The growth of topography during sputtering of amorphous solidsJournal of Materials Science, 1973
- Prediction of ion-bombarded surface topographies using Frank's kinematic theory of crystal dissolutionJournal of Materials Science, 1973
- The topography of sputtered semiconductorsRadiation Effects, 1973
- Microtopography of surfaces eroded by ion-bombardmentJournal of Materials Science, 1969
- Influence of the Angle of Incidence on Sputtering YieldsJournal of Applied Physics, 1959