Distributed electrostatic micro actuator

Publisher Website

30 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/memsys.1993.296944

Abstract

No abstract available

Keywords

DISTRIBUTED ELECTROSTATIC MICRO ACTUATOR

This publication has 3 references indexed in Scilit:

Sub-micron gaps without sub-micron etching
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
IC-processed electrostatic micromotors
Sensors and Actuators, 1989
Microrobots and micromechanical systems
Sensors and Actuators, 1989