Residual Gas Analysis and Leak Detection by Time-of-Flight Measurements on Neutral Metastable Atoms and Molecules

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Abstract
We have designed and built a residual gas analyzer which is sensitive to N2, He, A, Ne, and other molecules which have energetic metastable states. The presence of these gases is revealed by measuring the time of flight of metastable, electrically neutral molecules between a pulsed electron gun and an Auger surface detector. When used as a residual gas analyzer, the present instrument can detect partial pressures of 10−7 Torr or greater; when used as a leak detector with helium tracer gas, the instrument can detect leak rates of 10−5 Torr liters/sec or larger. The sensitivity of the present instrument can be markedly improved with obvious refinements. The metastable time-of-flight analyzer will operate in a 10−4 Torr environment and it has other advantages which may make it a valuable complement to the more conventional methods of leak detection and residual gas analysis.

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