Langmuir probe studies of oxygen and chlorine discharges in a 13.56 MHz plasma reactor
- 1 January 1991
- Vol. 42 (15) , 1009-1012
- https://doi.org/10.1016/0042-207x(91)90009-8
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A self-compensating Langmuir probe for use in rf (13.56 MHz) plasma systemsVacuum, 1991
- Plasma diagnostic studies for reactive ion etching systemsVacuum, 1988
- The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmasJournal of Physics D: Applied Physics, 1987
- Langmuir probe and optical emission spectroscopic studies of Ar and O2 plasmasVacuum, 1987
- The Theory of Collectors in Gaseous DischargesPhysical Review B, 1926