Optical Reflectivity Studies of Damage in Ion Implanted Silicon

• 1 May 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (5) , 955-956
• https://doi.org/10.1143/jjap.17.955

Abstract

Keywords

• OPTICAL REFLECTIVITY
• ION IMPLANTED SILICON
• REFLECTIVITY STUDIES
• STUDIES OF DAMAGE
• DAMAGE IN ION