Surface Morphology and Chemistry of 4H- and 6H-SiC after Cyclic Oxidation

• 1 April 2002
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 389-393, 1101-1104
• https://doi.org/10.4028/www.scientific.net/msf.389-393.1101

Abstract

Keywords

• ATOMIC FORCE MICROSCOPE (AFM)
• CLS
• LEEN
• OXIDATION
• SURFACE CHEMISTRY
• SURFACE MORPHOLOGY
• X-RAY PHOTOELECTRON SPECTROSCOPY (XPS)