An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas
- 1 April 1996
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 31 (7) , 1879-1885
- https://doi.org/10.1007/bf00372203
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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