Some characteristics of hard carbonaceous films

Publisher Website

1 January 1977

journal article
Published by Elsevier in Thin Solid Films

Vol. 40, L31-L32
https://doi.org/10.1016/0040-6090(77)90097-9

Abstract

No abstract available

This publication has 1 reference indexed in Scilit:

Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma
Thin Solid Films, 1976