Plasma parameter characterization of a tandem multicusp ion source operating in H2 and D2
- 1 January 1990
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (1) , 451-453
- https://doi.org/10.1063/1.1141270
Abstract
The basic plasma parameters of a tandem multicusp ion source operating with hydrogen and deuterium gas have been measured and are compared. It is found that there is little variation in the electron temperature or electron energy‐distribution function; however, both the electron density and plasma potential are consistently higher when operating with D2 rather than H2 gas. The experimental results are in general agreement with simple models of the discharge.Keywords
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